Performance boost for microchips
Flat computers, powerful cell phones and tablets – the integrated circuits, our computers' power centers, are becoming increasingly smaller and more complex. The microchips in today's computers already contain some two billion transistors. To get the chip density right, the structures are exposed onto the chips by means of lithography. To be able to meet future requirements, the semi-conductor industry is planning to convert the exposure using a wavelength of 193 nm to a wavelength of just 13.5 nm. This can be achieved only with completely new radiation sources. The favorite ...










