Low-cost microscope projection photolithography system for high-resolution fabrication
Integrated optical signal distributing, processing, and sensing networks require the miniaturization of basic optical elements, such as waveguides, splitters, gratings, and optical switches. To achieve this, fabrication approaches that allow for high-resolution manufacturing are required. Curved elements like bends and ring resonators are especially challenging to fabricate, as they need even higher resolution and lower sidewall roughness. Additionally, fabrication techniques with precise control of absolute structure dimensions are imperative. Several ...
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